High Vacuum Class Compatible Switch "GN Series"
Adoption of low outgassing materials, adhesives, and cables. Positioning switch specifically for high vacuum environments.
The "GN Series" is a positioning switch specifically designed for high vacuum environments, manufactured solely with low outgassing compatible components. It is being increasingly adopted by major semiconductor manufacturing equipment manufacturers for positioning applications of wafers and masks within vacuum deposition and sputtering equipment. 【Main Specifications】 ■ Contact Structure: Contact Type ■ Operating Mode: A: NO / B: NC ■ Repetition Accuracy of Operating Point: 0.003mm (range) for both ON and OFF ■ Compatible Vacuum Level / Baking Tolerance Temperature: 10-5Pa / 120℃ ■ Movement to Operation: Approximately 0.3 (A: NO) / None (B: NC) ■ Hysteresis: 0 ■ Contact Precision Life: 3 million cycles ■ Stroke: 1.5mm ■ Contact Force: 0.5N ■ Contact Rating: DC5V to DC24V, steady current below 10mA (inrush current below 20mA) *For more details, please refer to the PDF document or feel free to contact us.
- Company：メトロール
- Price：Other
